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| Yoshinori Matsumoto
, Ph. D. |
| RESEARCH INTEREST |
| Micromachining, Integrated
circuit, Silicon sensor |
| EDUCATION |
Ph.D., Electronic
engineering, Tohoku University, 3/1993
M.S., Electronic engineering, Tohoku University, 3/1990
B.Eng., Electronic engineering, Tohoku University, 3/1988 |
| RESEARCH AND PROFESSIONAL EXPERIENCE |
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Associate Professor, Dept. Applied Physics and Physico-Informatics,
Keio University 4/2003-present
Assistant Professor, Dept. Applied Physics and Physico-Informatics,
Keio Unive rsity 4/1999-3/2002
Instrucdtor, Dept. Electric and Electronic Engineering, Toyohashi
University o f Technology 4/1993-3/1999
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| MAJOR PUBLICATIONS |
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- Y. Matsumoto S.Kawahito and M. Ishida:" Development and evaluation
of capacitance detection ASIC for three-axis common electrode
type capacitive accelerometer", The transaction of IEEE Japan,
Vol.121-E, No.3, March, pp.135-141, (2001).
- Y. Matsumoto and M. Ishida:"The property of plasma polymerized
fluorocarbon film in relation to CH4/C4F8 ratio and substrate
temperature",Sensors and Actuators A, Vol.83, pp.179-185, (2000).
- Y. Matsumoto, M. Nishimura, M. Matsuura, M. Ishida: "Three-axis
SOI capacitive accelerometer with PLL C-V converter",Sensors and
Actuators A, Vol.75, pp.77-85, (1999).
- Y. Matsumoto, T. Shimada, M. Ishida:"Novel prevention method
of stiction using silicon anodization for SOI structure", Sensors
and Actuators Vol.72, pp.153-159, (1999).
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